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Inline Magnetron Sputtering Vacuum Coating Machine For Thin Film Deposition on Glass Panels
Vacuum magnetron sputtering technique is the use of the female, bipolar electrode surface with the magnetic field of the electron in the cathode surface drift, by setting the target surface electric field perpendicular to the magnetic field, the electron increases stroke, increase the rate of ionization of the gas, while the high-energy particles gas and lose energy after the collision and so lower substrate temperature, complete coating on a non-temperature resistant material. Vacuum magnetron sputtering coating has the following advantages:
(1) The thickness of the coating can be controlled, according to the needs of people plating film, and the coating can be repeated, but also to break the limit of the prior art, to obtain a uniform film thickness on a large surface;
(2) Film obtained by this technique with strong adhesion;
(3) This technique can be prepared a special film material, according to their needs while sputtering hybrid film, compound film;
(4) high purity film.
We provide customized options for the machine, such as the different vacuum pumping systems, gas distribution system, coating system, etc.
Main Specifications:
| Parts Name | Vacuum magnetron sputtering system |
| * Main application | Mirror making; ITO conductive glass, Low-E glass and sun reflecting glass; Solar cells; other thin film coating. |
| * Custom made(Vertical or Horizontal chamber)working chamber in Rectangular or cylindrical | Single layer or with cooling jacket |
| * Base material of body | Carbon steel or stainless steel |
| * Custom made carousel/rack/jigs | √ |
| * High vacuum system based on oil diffusion pumps or molecular pump, roots/booser pump and mechanical pumps; | √ |
| * Electrical controlling center with PLC screen, automatic and manual work modes available; | √ |
| * Tungsten&aluminum filament evaporation unit | × |
| * Magnetron sputtering cathodes in Rectangular or cylindrical | √ |
| * Arc deposition unit | × |
| Notice: This is a kind of custom made machine, the three above unit can be united in the same machine for multi-functional applications. | |
| * Power support | Magnetron sputtering source |
| * Gas feeding system | √ |
| * Cool water | For pumps and cathodes |
| * Compressed air needed | √ |
Company profile:
Xiangtan Hondson Coating Technology Co., Ltd., which is in the field of metal coatings, specializes in PVD (Physical Vapor Deposition) area. We produce vacuum aluminum evaporation machine, magnetron sputtering machine and arc deposition machine.
Xiangtan Hondson Coating Technology Co., Ltd. has enjoyed conspicuous success in the design, manufacture of PVD Vacuum Coating Machines. We are specialized in innovative PVD technology, as well as equipment for various applications, including electronics, thin film deposition, vacuum coated glass, automotive, plastic decorations, harden protective coatings on tools, molds, drills, knives, etc.
Our high quality Vacuum Coaters are sold to foreign and domestic markets and win their praise and good graces. We are happy to establish business relationship with customers all over the world. If you are interested in our products, or you are looking for cooperation partners in China for Vacuum Coating Equipment, welcome to contact us for further information.
Every machine is designed according to customer's real requests.
